ESXLM2

ESXLM2 is a family of single axis MEMS capacitive accelerometers dies, which are the latest additions to the existing range of ESS’s accelerometers. ESXLM2 family consists of three different members with distinct measurement ranges of ±2g, ±10g, ±20g. This is the second generation of ESS’s MEMS accelerometers, targeting high end applications, including aerospace, where high performance and reliability is critical.

The sensors rely on differential capacitive architecture in order to detect the displacement of a suspended mass due to inertial forces. The fabrication technology is surface micromachining on SOI wafer with 0.1 μm resolution and wafer level packaging capability. The latter enables the control of the pressure wherein the moving mass resides to low pressure values, enabling a reduction of the damping coefficient. In addition, the presence of electrical isolation trenches allows the utilization of multiple capacitors on a single die.

ESXLM2 accelerometers exhibit very low Brownian noise values (less than 10μg / HZ0.5 in all cases), while they provide increased sensitivity values. Furthermore, they have been designed so that they maintain an extremely linear behavior (typically below 0.2% FSO) even for open loop operation. All devices exhibit the ability for self-test due to the presence of force capacitors, while their operating range extends from -40oC to +120oC. Enhanced electrical shielding capabilities are provided in order to increase stability performance.

ESS accelerometers can either be delivered as single dies or co-packaged with ESS mixed signal readout electronics. The packaged component produces either analog or digital output while the operation is reconfigurable.

Specifications

ESXLM2-2C

ESXLM2-10C

ESXLM2-20C

Units

Measurement Range

±2

±10

±20

G

Rest Capacitance at each comb drive

23

24

10

pF

Scale Factor

180

100

22

fF/g

Noise

5

5

9

Μg / Hz0.5

Resonance

1.8

3

5.5

kHz

Non-Linearity (Non-Calibrated)

0.1

0.2

0.1

% FSO

Temperature Range

-40 … +125

-40 … +125

-40 … +125

oC

Mechanical Dimensions (L x W x H)

6 x 5.7 x 0.8

6 x 5.7 x 0.8

6 x 5.7 x 0.8

mm