Acceleration Sensors

Acceleration Sensors

ESS accelerometers are a single axis capacitive MEMS transducers with a measurement range of ±10g. The device principle of operation is based on the displacement of a proof mass suspended by two silicon springs as a result of the induced acceleration.


The mass deflection is measured using differential capacitor comb drives consisting of an array of capacitors made up by fixed fingers and fingers attached to the moving proof mass. The devices are encapsulated on the wafer level, thus securing a controlled vacuum for the sensing elements, allowing noise reduction.


ESS accelerometers can either be delivered as single dies or co-packaged with ESS mixed signal readout electronics IC. The packaged component produces either analog or digital output while the operation is reconfigurable.

ESXLM1-10

ESXLM1-10 is the most compact member of ESS family of accelerometers, featuring a 2mm die. It provides the fundamental acceleration sensing capabilities with no self-test option.

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ESXLM1-11

The additional feature of ESXLM1-11 is the ability for in-situ self-test, due to the presence of force capacitors.

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ESXLM2-2

ESXLM2c-2 is the most sensitive of ESS accelerometers, featuring a measurement range of ±2g and a non-linearity value of less than 0.1% FS. The device also incorporates a self-test option. The die dimensions are 6 × 5.7 × 0.8 mm.

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ESXLM2-10

ESXLM2c-2 is the most sensitive of ESS accelerometers, featuring a measurement range of ±2g and a non-linearity value of less than 0.1% FS. The device also incorporates a self-test option. The die dimensions are 6 × 5.7 × 0.8 mm.

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ESXLM2-20

ESXLM2c-20 features a measurement range of ±20g which is the largest among all ESS accelerometer devices. A self-test feature is also incorporated while the exhibited non-linearity value is less than 0.1%. The die dimensions are 4.6 × 5.7 × 0.8 mm.

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